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ALD/ALE 2022 Health & Safety Plan

To promote the safety of ALD/ALE 2022 attendees, we will monitor the guidance and requirements in the European Union, Belgium (specifically the Flanders region) as well as the World Health Organization regarding COVID-19 safety practices. Therefore, this Attendee Safety Plan may change from time to time through the last day of ALD/ALE in June 2022

Review ALD/ALE 2022 Health & Safety Plan Requirements

Meeting Overview

The AVS 22nd International Conference on Atomic Layer Deposition (ALD 2022) featuring the 9th International Atomic Layer Etching Workshop (ALE 2022) will be a three-day meeting dedicated to the science and technology of atomic layer controlled deposition of thin films and now topics related to atomic layer etching.  Since 2001, the ALD conference has been held alternately in the United States, Europe and Asia, allowing fruitful exchange of ideas, know-how and practices between scientists. This year, the ALD conference will again incorporate the Atomic Layer Etching 2022 Workshop (ALE 2022), so that attendees can interact freely. The conference will take place Sunday, June 26-Wednesday, June 29, 2022, at the International Convention Center (ICC) Ghent in Ghent, Belgium.

As in past conferences, the meeting will be preceded (Sunday, June 26) by one day of tutorials and a welcome reception. Sessions will take place (Monday-Wednesday, June 27-29) along with an industry tradeshow. All presentations will be audio-recorded and provided to attendees following the conference (posters will be included as PDFs). Anticipated attendance is 800+.

Technical Program & Scheduler

ALD Program Chairs

Program Chair:
Christophe Detavernier (Ghent University, Belgium)

Program Co-Chair:
Jolien Dendooven (Ghent University, Belgium)

Program Co-Chair:
Paul Poodt (TNO/Holst Center, The Netherlands)

ALE Program Chairs

Program Chair:
Erwin Kessels (Eindhoven University of Technology, The Netherlands)

Program Co-Chair:
Harm Knoops (Oxford Instruments, The Netherlands)

Program Co-Chair:
Jean-Francois de Marneffe (imec, Belgium)

Key Dates

Abstract Submission Deadline:
February 3, 2022
Author Acceptance Notifications:
March 167, 2022
Late News Abstract Deadline:
April 6, 2022
Pre-Registration Deadline:
May 15, 2022
Hotel Deadline:
May 25, 2022
Manuscript Deadline:
December 15, 2022

Future Meeting Dates

ALD/ALE 2023:
July 23-26, 2023
Bellevue, Washington
ALD/ALE 2024:
August 4-7, 2024
Helsinki, Finland
ALD/ALE 2026:
June 28-July 1, 2026
Tampa, Florida

Downloads

Copyright
Agreement

DOWNLOAD

Health & Safety
Plan

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Sponsor & Exhibitor
Form

DOWNLOAD

Technical
Program

DOWNLOAD

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Key Dates

Abstract Submission Deadline:
February 3, 2022

Author Acceptance Notifications:
March 17, 2022

Late News Abstract Deadline:
April 6, 2022

Pre-Registration Deadline:
May 15,  2022

Manuscript Deadline:
December 15, 2022

Downloads

  • Copyright Agreement
  • Health & Safety Plan (PDF)
  • Presentation Instructions
  • Sponsor & Exhibitor Form (PDF)
  • Technical Program (PDF)

Contact

AVS
Della Miller

Event Manager
110 Yellowstone Dr. Suite 120
Chico, CA 95973
(530) 896-0477
della@avs.org

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